Technology

LIGENTEC: all-nitride AN core technology

Ultra wide transparency window reaching from 250-8000nm of wavelength

High nonlinear coefficient for nonlinear integrated photonics applications

High refractive index of 2.00 enabling high confinement waveguides and cost benefits through reduced device size

Deposited amorphous material allowing monolithic 3D integration of devices on the same chip

Ultra thick low loss LPCVD SiN for excellent mode-confinement and small bending radius

The waveguides are built by high quality silicon nitride, cladded in high quality silicon dioxide. Nitride thickness is fixed per batch and ranging from 150-1300nm depending on the application. Such high nitride thickness is enabled by LIGENTEC proprietary process, ensuring exceptional mode confinement, sharp bending radius and reduced device footprint. The high nitride thickness permits anomalous dispersion and a high damage threshold that is very important for LIDAR, quantum and nonlinear optical applications of these integrated devices.

 

LIGENTEC process offers a state of the art, cost-effective platform with superior critical dimension and thickness control. The process is accompanied by a validated design library, offering a rapid and low cost prototyping solution. The library developed with VLC Photonics includes integrated components for:

  • Spot converters
  • Ultra low loss spirals

  • MZI, MMI

  • Ring resonators

  • Filters

  • AWG

  • Heaters

Technology

LIGENTEC: all-nitride AN core technology

Ultra wide transparency window reaching from 250-8000nm of wavelength

High nonlinear coefficient for nonlinear integrated photonics applications

Deposited amorphous material allowing monolithic 3D integration of devices on the same chip

High refractive index of 2.00 enabling high confinement waveguides and cost benefits through reduced device size

Ultra thick low loss LPCVD SiN for excellent mode-confinement and small bending radius

The waveguides are built by high quality silicon nitride, cladded in high quality silicon dioxide. Nitride thickness is fixed per batch and ranging from 150-1300nm depending on the application. Such high nitride thickness is enabled by LIGENTEC proprietary process, ensuring exceptional mode confinement, sharp bending radius and reduced device footprint. The high nitride thickness permits anomalous dispersion and a high damage threshold that is very important for LIDAR, quantum and nonlinear optical applications of these integrated devices.

 

LIGENTEC process offers a state of the art, cost-effective platform with superior critical dimension and thickness control. The process is accompanied by a validated design library, offering a rapid and low cost prototyping solution. The library developed with VLC Photonics includes integrated components for:

  • Spot converters
  • Ultra low loss spirals

  • MZI, MMI

  • Ring resonators

  • Filters

  • AWG

  • Heaters

Measured Performance

Performance measurements with LIGENTEC validated design.

Market Areas

LIDAR

LIDAR (Light Detection and Ranging) is a sensing method, which utilizes light to measure distances and velocities. It is widely used in many areas including autonomous vehicles and robotics, navigation, aerial mapping and other geo-related measurements, atmospheric research, etc.

Transparency and low loss propagation in the visible and NIR regions make Silicon Nitride (SiN) platforms attractive for many biophotonic sensing and imaging applications. As these areas usually rely on expensive, complicated and often bulky equipment, integrated photonics can bring here cost reduction.

Quantum systems could be built based on different phenomena and use different information carriers, but photonics occupies a special place among other realizations due to the possibility to incorporate quantum states generation, transmission and measurements on a single platform having less sensitivity to environmental noise.

DATACOM

AUGMENTED REALITY

TELECOM

METROLOGY &

LASER INTEGRATION

FILTERS

SPACE & DEFENCE

NEUROMORPHIC

COMPUTING

LOW-LOSS INTEGRATED PHOTONICS