LIGENTEC process offers a state of the art, cost-effective platform with very high geometric accuracy. The process is accompanied by a complete PDK (available in L-edit, Calibre, Luceda and Synopsys). The PDK includes DRC rules files, and validated simulation film for our reference designs. Example of reference design:
- Spot converters
- Ultra low loss spirals
- MZI, MMI
- Ring resonators
An unique feature of the thick waveguides is their anomalous dispersion and their high damage threshold that is important in a range of nonlinear optical applications, including integrated quantum communication, supercontinuum generation in waveguides from pulsed lasers, femtosecond pulse generation from CW lasers using soliton generation in microresonators. The high power threshold enables applications such as LIDAR to propagate Watts of power in the waveguides. In addition the transparency window in the visible renders silicon nitride planar photonic circuits attractive for microfluidics and bio-sensing applications.