LIGENTEC, a specialist foundry delivering innovative, low loss, thick silicon nitride (SiN) services for photonic integrated circuit designers and manufacturers, has added a next-generation heater module for its ‘AllNitride’ line of process services. The new heater module was developed using Lumerical’s Device Suite of photonic simulation software.
According to the company, LIGENTEC’s advanced heater module provides four times more thermooptical tuning and improved stability for tunable ring resonators and Mach Zehnder Interferometers (MZI) than standard heaters developed in silicon nitride. Development of the new heater module was customer driven – LIGENTEC indicated their customer needed a large tuning range for a ring resonator that was not available with other heater materials. In their application the material needed to reach a temperature over 300$ C to achieve the large tuning range that they needed.